High Performance Motion Tracking Control for Electronic Manufacturing
نویسندگان
چکیده
منابع مشابه
High Performance Motion Tracking Control for Electronic Manufacturing
Motion control requirements in electronic manufacturing demand both higher speeds and greater precision to accommodate continuously shrinking part/feature sizes and higher densities. However, improving both performance criteria simultaneously is difficult because of resonances that are inherent to the underlying positioning systems. This paper presents an experimental study of a feedforward con...
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ژورنال
عنوان ژورنال: Journal of Dynamic Systems, Measurement, and Control
سال: 2007
ISSN: 0022-0434,1528-9028
DOI: 10.1115/1.2789467